| 摘要 |
PURPOSE:To obtain RE1Ba2Cu3O7-x-based superconducting thin film by combining a calcined product from the oxides of the respective components in the above composition ratio with, as the vaporization source, a second calcined product from RE2O3 powder and Cu powder to ensure insufficient components to be compensated. CONSTITUTION:Firstly, respective oxides of rare earth element (RE), Ba and Cu are mixed in the ratio 1:2:3 and calcined to produce a sintered form of the formula RE1Ba2Cu3Ox. Secondly, this sintered form is ground and combined with, as the vaporization source, pellets formed by calcining RE2O3 powder and Cu powder. Finally, the resultant combination is subjected to electron beam deposition or sputterling process to obtain the objective superconducting thin film of the formula RE1Ba2Cu3O7-x. This process with allow the RE, Ba or Cu to be lost during the electron beam deposition or sputtering steps to be compensated, thus enabling a film giving superconductivity at the liquid nitrogen temperatures to be produced in a single step. |
