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发明名称
CLEANING VESSEL
摘要
申请公布号
JPH01192122(A)
申请公布日期
1989.08.02
申请号
JP19880017836
申请日期
1988.01.28
申请人
SUMITOMO ELECTRIC IND LTD
发明人
MORIKAWA HISASHI
分类号
H01L21/304;B08B3/04
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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