| 摘要 |
PURPOSE:To decide whether or not foreign matter is generated in a semiconductor manufacturing process by providing an exciting light irradiating means for the foreign matter and switching and using it and a light beam for normal foreign matter inspection. CONSTITUTION:A detection system for a foreign matter position, shape, etc., and a top lighting type fluorescent microscope system are switched by a switching mechanism 19, which consists of a linear moving base moves the exciting light generation light source 11, an exciting film 13, and a dichroic mirror 15 forth and back horizontally in one body while mounting them; and exciting light obtained from the light source 11 is excluded from the path R of reflected light in the backward movement state and put in the path R shown in a figure in the forward movement state. Consequently, fluorescent light generated by the foreign matter is photodetected or observed at almost, for example, 550nm to decide whether or not the foreign matter is generated in the semiconductor manufacturing process. |
