| 摘要 |
PURPOSE:To prevent generation of cracks in a connection part between a leaf spring and a tilting body by forming a pair of leaf springs consisting of a single spring member across a split groove provided from one end of the spring member to the other end, and integrally connecting the tilting body on the other end of the spring member. CONSTITUTION:A movable element 4 is arranged on the upper end of a piezoelectric element 1, and a motion mechanism 5 for conversion of the displacement of the movable element 4 based on the expansion and contraction of the piezoelectric element 1 to a tilting action is provided between the movable element 4 and the upper end of the rising part of a frame 2. The motion mechanism 5 is composed of a spring member of specified plate thickness 6 as a main component, and a split groove 6a is formed in the center of the plate thickness of the spring member 6. In addition, a pair of leaf springs 7, 8 opposed to each other across the split groove 6a and a tilting body 9 which connects the ends of the leaf springs 7, 8 are integrally provided. The both lead springs 7, 8 protrude by a specified length from the upper end surfaces of the frame 2 and the movable element 4, and are fixed by brazing on a spring- installed surface formed on a surface where the frame 2 and the movable element 4 are opposed to each other. Recessed parts 7a, 8a are formed on the protruding part, making an elastic deformed part which is a thin part. |
