发明名称 ROLLERS CONTROL COOLING OF SILICON MELT TO FORM SILICA COLUMNAR RODS
摘要 A process and apparatus for the manufacture of silicon rods having a columnar structure comprising monocrystalline crystal zones with a crystallographic preferred orientation. Molten silicon is transferred from a silicon reservoir into a crystallization chamber which is formed by rollers arranged in a leak-proof manner in the shape of the desired rod cross-section. There the silicon first forms a stable outer shell of solidified material and, while it continues to crystallize, it is withdrawn at the bottom and released by the rollers. Owing to the short period of contact with a vessel wall a silicon rod is obtained that is particularly free of impurites.
申请公布号 AU586885(B2) 申请公布日期 1989.07.27
申请号 AU19860062316 申请日期 1986.09.03
申请人 WACKER-CHEMITRONIC GESELLSCHAFT FUR ELEKTRONIKGRUNDSTOFFE MBH 发明人 HORST STOCK;LOTHAR HUBER;GEORG PRIEWASSER
分类号 C30B29/06;C30B11/00;C30B15/00;C30B15/02;C30B15/08;H01L21/18;H01L21/208;(IPC1-7):C30B15/08;C30B15/10 主分类号 C30B29/06
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