SUPERCONDUCTING THIN FILM OF COMPOUND OXIDE AND PRODUCTION THEREOF

摘要

PURPOSE:To increase the critical current density and superconducting critical temp. of a thin film of a superconductor of a compd. oxide represented by a specified formula when the thin film is formed by physical vapor deposition by carrying out the vapor deposition so as to smoothen the surface of the thin film. CONSTITUTION:A thin film of a compd. oxide superconductor is formed on a metal or semiconductor substrate by physical vapor deposition. The superconductor is based on a compd. oxide represented by the formula (where Ln is Tm and/or Lu and x=0-1) and the physical vapor deposition is carried out so as to smoothen >=80% of the surface of the thin film.