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发明名称
PROCESS FOR FORMING ISOLATION REGIONS IN A SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
EP0200771(B1)
申请公布日期
1989.07.26
申请号
EP19850905690
申请日期
1985.10.28
申请人
NCR CORPORATION
发明人
ROGERS, STEVEN, HILL;MUNDT, RANDALL, STEVEN;KAYA, DENISE, ANN
分类号
H01L21/76;H01L21/762
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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