| 摘要 |
PURPOSE:To stabilize an oriented film and to obtain a satisfactory liquid crystal display device which can execute a display of a large capacity by using an organic thin film containing fluorine which is formed by a spattering method, as the oriented film. CONSTITUTION:A spattering device is provided with a target 1, a substrate 2, a matching circuit 3 and a high frequency oscillator 4. In such a liquid crystal display device, especially, by an oriented film, a high pre-tilt angle of a liquid crystal molecule can be realized uniformly and with high reprodicibility, and a display of a high quality and a large capacity can be obtained with a high yield. The reason why the high pre-tilt angle is obtained stably is because an organic thin film whose surface is fluorinated is used as an oriented film. It is related to a fact that said surface becomes hydrophobic by the surface of the fluorinated resin. A fact that the surface is hydrophobic can be confirmed by measuring a contact angle of a suitable liquid. |
