| 摘要 |
PURPOSE:To enable x-axis table driving force to be small and positioning control to be extremely speedy and highly accurate by providing an air cylinder for compensation for balancing each weight of x-axis and y-axis tables. CONSTITUTION:An air cylinder 5 for compensation and a y-axis table 6 are connected magnetically by permanent magnets 10 and 13. Supporting and working forces matching the weight of weight plus y-axis tables 6, 6 of an x-axis table 2 are operated upward by constantly supplying a compressed air of a certain pressure to an actuation chamber 22. A y-axis table 6 is driven upward or downward by linear motors 9 and 8. Thus, in either upward or downward drive, the same driving force can be used for linear motors 7 and 8 for allowing positioning control to be made highly precisely and at high speed. |
