APPARATUS FOR MANUFACTURING SURFACE STRUCTURES IN THE NANOMETER RANGE

摘要

The apparatus for manufacturing surface structures in the nanometer range comprises an aperture (11) having a diameter of less than 30 nanometers and maintaned above the surface (8) of a target (7) at a constant distance of about 1 nanometer, the aperture (11) being associated with a laser light source (13). The aperture/target assembly is housed in a processing chamber (1) within which an appropriate partial pressure of a reactant gas can be maintained with the aid of tubing (16, 17) and gauge means (21). The reactant gas may, for example contain metal alkyls and/or metal carbonyls which are dissociable by the laser beam with the metal phase being deposited on the surface (8) of the target (7) in the form of fine structures of nanometer dimensions. The aperture (11) and the target (7) are supported on a common base (2) which is vibration-insulated from the outside world by means of a damping device (3). The mutual rough and fine scanning displacements between the aperture (11) and the target are performed by xyz-drive modules (6, 15).