| 摘要 |
PURPOSE:To obtain fluorocarbons, such as CF4, CF3CF3 or CF3CF2CF3, by fluorinating decomposition of tetrafluoroethylene in the presence of an alkaline metal fluoride and/or alkaline earth metal fluoride. CONSTITUTION:Polytetrafluoroethylene is formed into a fine shape, such as chip, piece of film or powder, and subjected to fluorinating decomposition in the presence of an alkali metal fluoride and/or alkaline earth fluorine (preferably NaF, KF or CaF2) at 300-600 deg.C to afford fluorocarbons. The F2 gas is used without diluting according to purposes or diluting with an inert gas. The resultant fluorocarbons have wide uses as etching gas in semiconductor industry, vapor-phase insulators, leak testing agents, etc. |
