发明名称 BALL FORMING METHOD IN WIRE BONDER
摘要 PURPOSE:To recognize the position of a body, a position thereof is to be recognized, such as a pellet positively by using one side of measuring points as reference and deciding the presence of the other measuring point within the allowable range of the one measuring point. CONSTITUTION:The measuring points 2a, 3a are photographed by means of a camera 4, said measuring points are recognized by an arithmetical operating section 10, and the presence of the other measuring point 2a within necessary ranges in the X direction and Y direction is decided using one measuring point 3a as reference in a defective recognizing checking section 14. When the other measuring point 2a exists within the allowable range, confirming signals are outputted to a control section 11, a wire bonder 12 is operated and bonding is conducted while the pellet is removed from the object of wire bonding when the other measuring point 2a does not exist within the allowable range, and the position of the pellet is recognized through the second check of defective recognition.
申请公布号 JPH0133940(B2) 申请公布日期 1989.07.17
申请号 JP19810073528 申请日期 1981.05.18
申请人 HITACHI LTD 发明人 TAKASUGI NOBUHIRO;KYOMASU RYUICHI;SHIGYO SEIJI
分类号 G01B11/00;H01L21/60 主分类号 G01B11/00
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