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发明名称
WIRING PROCESS
摘要
申请公布号
JPH01179432(A)
申请公布日期
1989.07.17
申请号
JP19880000714
申请日期
1988.01.07
申请人
NEC CORP
发明人
TAWADA SHIGEYOSHI
分类号
H01L21/82;G06F17/50;H05K3/00
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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