CONTACTOR FOR SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT

摘要

PURPOSE:To prevent both of a contact piece and a device from damaging by inserting and pulling out the device by a method wherein the contact piece of a contactor is normally opened to be closed by an external force after the device is lowered down to the contact position. CONSTITUTION:A device 2 carried on a device base 1 is lowered as it is pressed down upon the base 1 by a device stay 3 to be stopped on the position wherein the electrode of the device 2 is opposed to the contact piece 4 of a contactor. Later, a plate cam 6 is lowered to forcibly close the contact piece 4 by rollers 5 connected to the sides of the contact piece 4 so that the contact piece 4 may come into contact with the device 2. In such a constitution, the contact piece 4 is in normally open state so that the device 2 being inserted and pulled out may not slide along the contact piece 4 consequently not to be damaged while preventing the contactor from damaging.