Suspension for a sensor arrangement for detecting gases by means of exothermic catalytic reactions

摘要

The sensor arrangement contains a temperature-sensitive semiconductor component (4) which bears a catalyst layer (3). The semiconductor component (4) is contained in a semiconductor substrate (1) in a thermally insulated manner. The suspension is achieved by the semiconductor component (4) being connected via bridges (5) with the substrate (1) and by an insulating material, in particular air, being provided between the substrate (1) and the semiconductor component (4). <IMAGE>