| 摘要 |
PURPOSE:To position in high accuracy at a high speed with small size and weight by directly driving a controller to be driven by a strong electromagnetic force. CONSTITUTION:An annular member 34 protrudes on a base 20 by a drive controller employing a superconducting electromagnet, and an electromagnet 32 made of a superconducting material is placed thereon. A pair of leaf springs 22 are disposed in parallel in a direction Y in the member 34, and other pair of leaf springs 24 are disposed in parallel with a direction X perpendicularly crossing the direction Y thereon. A stage 26 is placed fixedly on the springs 24, many electric conductors 28 are buried in the direction X thereby to form electric conductor group 30. On the other hand, a large current flows to the electromagnet 32 to generate a strong magnetic flux, which is perpendicularly crossed with the group 30, thereby finely moving the stage 26 in the direction Y by the mutually operating force. Similarly, when the group is extended in the direction Y, the stage 26 can be finely moved in the direction X. |
