发明名称 Doping III-V compound semiconductor devices with group VI monolayers using ALE
摘要 An n-type III-V compound semiconductor comprises a plurality of monolayers of III-V compound semiconductor molecules having a layer-by-layer structure of group III element and group V element laminated alternately, and a group VI element-doped monolayer. The group VI element-doped monolayer is inserted into the III-V compound semiconductor molecules by occupying lattice points which were occupied by the group V element. The layers of the semiconductor are grown by Atomic Layer Epitaxy process.
申请公布号 US4845049(A) 申请公布日期 1989.07.04
申请号 US19880173808 申请日期 1988.03.28
申请人 NEC CORPORATION 发明人 SUNAKAWA, HARUO
分类号 H01L21/20;H01L21/205 主分类号 H01L21/20
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