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发明名称
ION IMPLANTER
摘要
申请公布号
JPH01167942(A)
申请公布日期
1989.07.03
申请号
JP19870329110
申请日期
1987.12.24
申请人
NEC YAMAGUCHI LTD
发明人
NAKATANI KENJI
分类号
H01J37/05;H01J37/141;H01J37/317;H01L21/265
主分类号
H01J37/05
代理机构
代理人
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