| 摘要 |
PURPOSE:To form the high density electrode terminal to be used for the external wiring by a method wherein the electrode terminal which will be used to connect wirings to outside is made into multilayer constitution through the intermediary of an insulating film and the above is then formed in stepped type. CONSTITUTION:An insulating film 51 is formed on a substrate 1 and an electrode wiring is formed thereon. Then, after an electrode terminal 41 required for the external wiring has been left over, an insulating film 52 is covered on the above, and then the electrode wiring of the second layer is formed. Also, the electrode terminal 42 required for outside wiring is left over, an insulating film 53 is covered thereon, and the layers of necessary number are formed in the same manner. As the terminal parts required for the external wiring are formed by multilayer wirings and arranged in stereoscopical form as above- mentioned, short-circuit troubles are lessened by the staircase-shaped stepping 6 which effectively works when an external wiring connection is performed, thereby enabling to reduce the wiring pitch and to accomplish the formation of the highly densed electrode terminal. |
