发明名称 |
Advanced vacuum processor |
摘要 |
A complete integrated circuit processing module, wherein multiple processing stations, each with its own vacuum isolation, are located inside a single module which is held at hard vacuum. A wafer transport arm mechanism permits interchange of wafers among the processing stations and a load lock. The load lock is equipped to remove and replace wafers from a vacuum-sealed wafer carrier. The wafers remain face-down and under hard vacuum during all the wafer handling steps.
|
申请公布号 |
US4842680(A) |
申请公布日期 |
1989.06.27 |
申请号 |
US19880188633 |
申请日期 |
1988.05.02 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
DAVIS, CECIL J.;WOOLDRIDGE, TIMOTHY J.;CARTER, DUANE E. |
分类号 |
H01L21/00;H01L21/677;H01L21/687 |
主分类号 |
H01L21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|