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发明名称
Electron beam contactless testing system with grid bias switching
摘要
申请公布号
US4843330(A)
申请公布日期
1989.06.27
申请号
US19860925764
申请日期
1986.10.30
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
GOLLADAY, STEVEN D.;HOHN, FRITZ J.;PFEIFFER, HANS C.
分类号
H01L21/66;G01N23/225;G01Q30/02;G01R31/02;G01R31/302;G01R31/306;H01L21/26;H05K3/46
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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