| 摘要 |
PURPOSE:To refresh a laser gas without interrupting gas laser oscillation by suspending the sealing operation of the laser gas and starting normal refresh operation when computed input output characteristics exceed deterioration limit reference characteristics and returning operation to sealing operation when characteristics are recovered to normal reference characteristics. CONSTITUTION:Discharge currents detected by a discharge input detector 6 and a laser output detected by a laser output detector 7 are input to a comparator 8, and input output characteristics are arithmetically operated by the comparator 8, and compared with proviously set reference characteristics, input output characteristics F1 in a normal laser gas and input output characteristics F2 at a deterioration limit. When the degree of deterioration of the laser gas exceeds the deterioration limit, sealing operation is stopped, the supply and exhaust of the laser gas are started, and the degraded laser gas is diluted gradually with the anew fed laser gas, and refreshed. An exhaust valve 5 is opened and closed through a controller 10 so that pressure in an oscillator detected by a pressure sensor 4 is brought to operating pressure at that time. When input output characteristics are recovered to a normal state, the supply and exhaust of the laser gas are stopped, and sealing operation is conducted again. |
