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发明名称
CHEMICAL VAPOR GROWTH DEVICE
摘要
申请公布号
JPH01160007(A)
申请公布日期
1989.06.22
申请号
JP19870319651
申请日期
1987.12.17
申请人
FUJITSU LTD
发明人
OHASHI SHUICHI
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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