| 摘要 |
PURPOSE: To attain quantitative and qualitative measurement with respect to an object by a microscope having a radiant sensing detector by filtering frequencies of electric signals from an electronic processing unit. CONSTITUTION: Detectors 8, 9 convert radiation modulated by an amplitude and phase structure of an object at a scanning point into an electric signal and a differential amplifier 10 combines the signals to obtain phase difference signals 11, which are combined by a summing amplifier 12 to obtain an amplitude signal 13. Th signals 11, 13 are synthesized into a complex signal by a synthesis circuit 20 and a high speed Fourier transformation is applied by a Fourier transformation circuit 22 to the signal, then it is analyzed into plural discontinuous frequency components. The frequency spectrum is filtered by a filter circuit 23 and the limited frequency spectrum is visualized by a image processing unit 25 via an inverse Fourier transformation circuit 24 and the signal is displayed on an image destination 26. Thus, even in the case of an object, with a low contrast, the height is quantitatively decided. |
