FORMATION OF DEPOSITED FILM AND APPARATUS THEREFOR,申请号JP19870316986-传众专利搜索

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发明名称	FORMATION OF DEPOSITED FILM AND APPARATUS THEREFOR
摘要
申请公布号	JPH01158736(A)	申请公布日期	1989.06.21
申请号	JP19870316986	申请日期	1987.12.15
申请人	SUMITOMO ELECTRIC IND LTD	发明人	SEMURA SHIGERU
分类号	H01L21/205;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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