| 摘要 |
<p>PURPOSE:To transfer a wafer one by one stably by using a simple apparatus without producing a dust particle and by using a clean room with a high degree of cleanliness by a method wherein, while a vehicle is being floated from a transfer route by using a magnetic fluid, the vehicle is moved along the transfer route and the wafer placed on the vehicle is transferred one by one. CONSTITUTION:While a vehicle is being floated on a travelling guide 12 by using a permanent magnet and a magnetic fluid, it is pulled by using a rope and is moved. A magnetic fluid 6 is attracted to the circumference of permanent magnets 42, 52 due to an influence of a magnetic field generated by the respective permanent magnets 42, 52 installed at a lower-end face of vehicles 4, 5; a buoyant force is generated magnetically; the permanent magnets 42, 52 are floated. Accordingly, the vehicles where the permanent magnets 42, 52 have been installed at the lower part are floated. Because the vehicles are moved by using ropes 7, 8 and the magnetic fluid 6 is moved by a driving force to pull the ropes together with the permanent magnets 42, 52, the vehicles are floated and moved.</p> |
