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发明名称
Method of and apparatus for forming film
摘要
A method and apparatus for forming an LB film on a substrate in which the film is deposited by raising and lowering the surface of the liquid on which the group of molecules is spread relative to the substrate.
申请公布号
US4840821(A)
申请公布日期
1989.06.20
申请号
US19880157146
申请日期
1988.02.11
申请人
CANON KABUSHIKI KAISHA
发明人
MIYAZAKI, TOSHIHIKO;SAKAI, KUNIHIRO;TOMIDA, YOSHINORI;SUGATA, HIROYUKI;MATSUDA, HIROSHI;NISHIMURA, YUKUO
分类号
B05D1/20
主分类号
B05D1/20
代理机构
代理人
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地址
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