| 摘要 |
PURPOSE:To form an insulating film generating no release by a short process, by forming a multilayer insulating film composed of required oxide, which electrically insulates a metal required diaphragm and the strain gauge formed thereon. CONSTITUTION:A pressure sensor is formed from a metal diaphragm composed of SUS, the multilayer electric insulating layer which is composed of silicon oxide, nitride, alumina or tantalum oxide laminated to said diaphragm and a strain gauge. When the multilayer insulating layer is formed by vacuum technique, each thin insulating layer generating no film-release is formed by a short process. |
