发明名称 PHOTOSENSITIVE AGENT
摘要 PURPOSE:To obtain the title agent which has the large bleaching action against light having a wavelength of <=300nm and the excellent solubility and does not have sublimating property by incorporating a specified aliphatic diazoketone which does not contain an aromatic ring in the photosensitive agent. CONSTITUTION:The photosensitive agent contains the aliphatic diazoketone shown by formula I (wherein R<1> and R<4> are each a monovalent org. group contg. no aromatic ring) as a photosensitive group. And the aliphatic diazoketone is bound to a satd. hydrocarbon skeleton substituted with hydroxy group in a side chain through an ester bond. Thus, the aliphatic diazoketone shows not only the excellent bleaching action with good efficiency, but also the excellent solubility and film forming property, and does not have the sublimating property and has the large solubility inhibiting effect against an alkali soluble resin.
申请公布号 JPH01155337(A) 申请公布日期 1989.06.19
申请号 JP19870314002 申请日期 1987.12.14
申请人 HITACHI LTD 发明人 SUGIYAMA HISASHI;EHATA KEISUKE;NATE KAZUO;MIZUSHIMA AKIKO
分类号 G03C1/72;G03C5/16;G03F7/004;G03F7/016;G03F7/039;G03F7/20;H01L21/027 主分类号 G03C1/72
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