| 摘要 |
PURPOSE:To detect a wavelength very accurately independent of the change of surroundings by a method wherein a wavelength detection section which detects an oscillation frequency of a laser is provided in a vessel that an environmental state such as temperature, pressure, and others is previously preset and controlled basing on a certain condition. CONSTITUTION:When a preset temperature data T0 and a preset pressure data P0 inside a chamber 7 are inputted through an input device and moreover a command of a control starting instruction is inputted, a chamber control section 19 reads measurements T1 and P1 of a thermosensor and pressure sensor and compares them with data T0 and P0 previously inputted. Basing on the result of this comparison, the chamber control section 19 sends control signals to a cooling unit 9 or a heat control section 13 and a valve drive section 15 so as to drive the cooling unit 9 or a heating unit 10, or an exhaust control valve 16 or a pressure control valve 17. The control is done so as to make T1 and P1 equal to T0 and P0 finally. |
