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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01308042(A)
申请公布日期
1989.12.12
申请号
JP19880139847
申请日期
1988.06.06
申请人
NEC CORP
发明人
TAKANO HIDEAKI
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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