LASER CVD DEVICE,申请号JP19870307905-传众专利搜索

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发明名称	LASER CVD DEVICE
摘要
申请公布号	JPH01149963(A)	申请公布日期	1989.06.13
申请号	JP19870307905	申请日期	1987.12.04
申请人	FUJITSU LTD	发明人	MUKAI RYOICHI
分类号	C23C16/48;H01L21/205;H01L21/263;H01L21/31	主分类号	C23C16/48
代理机构		代理人
主权项
地址

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