THIN FILM WIRING OF ALUMINUM,申请号JP19870310212-传众专利搜索

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发明名称	THIN FILM WIRING OF ALUMINUM
摘要
申请公布号	JPH01150335(A)	申请公布日期	1989.06.13
申请号	JP19870310212	申请日期	1987.12.07
申请人	NEC CORP	发明人	OKABAYASHI HIDEKAZU;TANIGAWA AKIO
分类号	H01L23/52;H01L21/28;H01L21/3205;H01L29/43	主分类号	H01L23/52
代理机构		代理人
主权项
地址

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