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发明名称
摘要
申请公布号
JPH0189740(U)
申请公布日期
1989.06.13
申请号
JP19870185089U
申请日期
1987.12.04
申请人
发明人
分类号
H01L21/31;H01L21/316;(IPC1-7):H01L21/31
主分类号
H01L21/31
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代理人
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