| 摘要 |
PURPOSE:To provide an ultrasonic machining needle which has excellent machining precision and well suitable for precision machining, by a method wherein a wear resistant right film of TiC, Al2O3, SiC, Si3N4, B, rigid carbon is adhered to the outer surface of the ultrasonic machining needle. CONSTITUTION:SiC6 is adhered approximately 5mum on the outer surface of a square columnar ultrasonic machining needle 1 formed by SUS304 soldered to the central part of the tip end surface of a hone 2 for ultrasonic wave machining formed by S45C. By using the hone 2 for ultrasonic machining having the ultrasonic machining needle 1, a square hole with a bottom is formed in a plate formed by quartz. In which case, the ultrasonic machining needle 1 is almost prevented from consumption, an uniform hole having high shape and size precision can be formed. By forming a wear resistant rigid film on the surface of the ultrasonic machining needle 1 in a manner described above, the ultrasonic machining needle 1 can be prevented from consumption and has excellent machining precision and is well suitable for precise machining. |
