| 摘要 |
PURPOSE:To cause deflection of waveguide light with a refractive index distribution corresponding to a temp. gradient generated by the absorption and generation of heat by the energization of a thin film Peltier element by providing the thin film Peltier element to above an optical waveguide. CONSTITUTION:An optical waveguide 210 is prepd. by diffusing Ti in wet N2 at 1,000 deg.C onto a Y-cut LiNbO3. An SiO2 buffer 200 is formed by the CVD process, and layers of Ta2N3 110 having high resistance, an n-layer 120 of a solid solution of Bi2Te3 and Sb2Te3, an SiO2 buffer 140, a p-layer 150 of a solid solution of Bi2Te3 and Sb2Te3, and Ta2N3 160, are laminated. Ta2N3 135 is partly interposed between the buffer 140 and the p-layer 150, and Al electrodes 100a, 100b are connected respectively to the Ta2N3 layers 110, 160, and the n-layer 120 is connected to the Ta2N3 layer 135 with an Al electrode 130. When an electric voltage is applied to the electrodes 100a, 100b, respectively, absorption and generation of heat are increased by the conduction of larger amt. of electric current at both terminals of the element at each boundary part, generating a distribution of temp. Thus, a similar distribution of refractive index is generated, and deflected light having high responsiveness is obtd. |
