| 摘要 |
PURPOSE:To enable accurate setting of gap amount between two samples with non-contact, by detecting optically the parallelism between the samples, and driving a retaining equipment retaining samples, based upon the detection. CONSTITUTION:A first sample 1 is fixedly retained, and a second sample 3 is retained so as to be parallel with the first sample 1, by an adjustable retaining equipment. The parallelism between the two samples is detected. The output from the optical detection system is input to an operational control equipment 16 in which the height of the second sample 3 and the contrast relation of a pattern on the sample 3 surface are stored, and the retaining equipment of the second sample 3 is driven. Therefore the gap amount between the first sample 1 and the second sample 3 can be detected in non-contact manner. Further the transferring distance to the desired gap amount of the second sample 3 is calculated, and the second sample 3 can be driven. Thereby enabling the gap setting of high accuracy in a short time. |
