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发明名称
APPARATUS FOR ATTACHING AND DETACHING SUBSTRATE
摘要
申请公布号
JPH01139764(A)
申请公布日期
1989.06.01
申请号
JP19870298156
申请日期
1987.11.26
申请人
SHIN MEIWA IND CO LTD
发明人
YAMABE SHINICHI;TAKIGAWA SHIRO
分类号
C23C14/50;C23C14/34
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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