摘要 |
PURPOSE:To form a diamond film having high adhesive strength to the base material of a tool by coating the surface of the base material with diamond together with a metal binder by the decomposition or evaporation of an org. compd. with a plasma jet generated by arc discharge. CONSTITUTION:A sintered hard alloy tool such as a cutting or polishing tool as a member to be treated is put in a plasma reactor, gases such as Ar, H2, CH4 and TiCl4 are introduced into the reactor and a plasma jet is generated. Carbon produced by the decomposition of the CH4 becomes fine diamond and forms a thin film on the surface of the tool with TiC produced by the decomposition of the TiCl4 as a binder to improve the wear resistance of the tool. |