Apparatus and process for the deposition of a thin layer on a transparent substrate, in particular for the manufacture of sheets of glass.

摘要

An apparatus comprising cathode plates (1, 3) so placed as to form the walls of a rectangular parallelepiped, is able to produce an atom beam for the formation of a thin layer deposited on a substrate and simultaneously an ion beam for the bombardment of the layer during its formation. The process for the deposition is also described. Thin layers can be formed on transparent substrates of large size, to be used as sheets of glass for buildings and motorcars.