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发明名称
VERFAHREN ZUR REGENERIERUNG VON DRAHTBONDFLAECHEN BEI DER FERTIGUNG VON HALBLEITERBAUELEMENTEN
摘要
申请公布号
DD268560(A1)
申请公布日期
1989.05.31
申请号
DD19880312376
申请日期
1988.01.22
申请人
VEB MIKROELEKTRONIK "ANNA SEGHERS" NEUHAUS,DD
发明人
LAUTENSCHLAEGER,PETER,DD;LINDNER,ROBERT,DD;BRANDT,LOTHAR,DD
分类号
H01L21/60;(IPC1-7):H01L21/60;H01L21/96
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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