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发明名称
MOLECULAR-BEAM APPARATUS FOR EPITAXIAL GROWTH
摘要
申请公布号
JPH01138194(A)
申请公布日期
1989.05.31
申请号
JP19870294430
申请日期
1987.11.20
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
MIHARA MINORU;NARISAWA TADASHI;YOKOZUKA TATSUO
分类号
C30B23/08;C30B29/40;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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