ELECTRON BEAM EXPOSURE,申请号JP19870297266-传众专利搜索

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发明名称	ELECTRON BEAM EXPOSURE
摘要
申请公布号	JPH01137629(A)	申请公布日期	1989.05.30
申请号	JP19870297266	申请日期	1987.11.24
申请人	HIKARI GIJUTSU KENKYU KAIHATSU KK	发明人	KUDO HIROAKI;TAKIGUCHI HARUHISA;SAKANE CHITOSE
分类号	G03F7/20;H01L21/027;H01L21/30	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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