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发明名称
Integrated circuit isolation process
摘要
申请公布号
EP0252450(B1)
申请公布日期
1996.10.09
申请号
EP19870109601
申请日期
1987.07.03
申请人
TEXAS INSTRUMENTS INCORPORATED
发明人
CHAPMAN, RICHARD A.;TENG, CLARENCE WAN-HSN
分类号
H01L21/316;H01L21/76;H01L21/762;(IPC1-7):H01L21/76;H01L21/32
主分类号
H01L21/316
代理机构
代理人
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