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发明名称
REACTION TUBE
摘要
申请公布号
JPH01133999(A)
申请公布日期
1989.05.26
申请号
JP19870289576
申请日期
1987.11.18
申请人
TEL SAGAMI LTD
发明人
INUKAI TADASHI;MORIKAWA SUSUMU;KOBAYASHI JUNICHI;KOMINO MITSUAKI;YAMADA HIROMASA
分类号
C30B25/14;C30B35/00;H01L21/203;H01L21/208
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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