| 摘要 |
PURPOSE: To detect curved X rays with optimum intensity and resolution by providing a segment whose center part is wide and edge part is narrow at a semiconductor element. CONSTITUTION: A plurality of semiconductor elements A-D with a same width consisting of a number of adjacent individual segments 1-3, 4-6, 7-9, and 10-12 are aligned. The widths of the center parts of the center segments 2, 5, and 8 of the semiconductor elements A-D is made equal to those of the semiconductor elements A-D and those of the edge parts are made extremely narrower. The widths of the edge parts of the other segments 1 and 3, 4 and 6, 7 and 9, and 10 and 12 are made wider than those of the center parts. The output of the segments 1-12 is processed by a signal processing device 20 via an analog - digital converter 21, thus measuring not only straight X rays but also curved X rays with optimum resolution and intensity.
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