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发明名称
CORROSION-RESISTANT MATERIAL FOR TURBO MOLECULAR PUMP
摘要
申请公布号
JPH01132796(A)
申请公布日期
1989.05.25
申请号
JP19870289617
申请日期
1987.11.18
申请人
MITSUBISHI HEAVY IND LTD
发明人
EBARA RYUICHIRO;YAMADA YOSHIKAZU;HIKITA KAZUO;ISHII FUMIO;MINAZU MASAHARU
分类号
C25D11/04;C25D11/18
主分类号
C25D11/04
代理机构
代理人
主权项
地址
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