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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01133323(A)
申请公布日期
1989.05.25
申请号
JP19870292357
申请日期
1987.11.19
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TAKEDA YOSHIYA
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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