| 摘要 |
<p>PURPOSE:To continuously and simultaneously analyze the thickness and composition of a film, by irradiating the film with infrared rays polarized in parallel to an incident surface at a Brewster angle and calculating the composition of the film from the absorption spectrum of the reflection spectrum of infrared rays. CONSTITUTION:The film 12 formed on a steel plate 10 runs in the direction shown by an arrow A. The incident light 24 of timewise interfering infrared rays emitted from an FT-IR light source part 50 is incident to a concave mirror 52 for incident light to irradiate the film 12 formed on the steel plate 10 so that an incident angle theta substantially becomes a Brewster angle. Further, the reflected light 28 from the upper surface of the film 12 and the reflected light 30 from the under surface thereof are condensed to a concave mirror 54 for emitted light to be incident to an FT-IR detection part 56. A polarizer 58 is driven in the light path of the incident light 24 by a polarizer driving part 60 to be moved to an insert position. The drive part 60 moves the polarizer 58 by the order of the FT-IR control part 62. In such a state that the polarizer 58 is inserted in the light path, the incident light 24 becomes polarized light parallel to the incident surface.</p> |
