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发明名称
PREPARATION OF SOI STRUCTURE
摘要
申请公布号
JPH01132115(A)
申请公布日期
1989.05.24
申请号
JP19870290918
申请日期
1987.11.18
申请人
SANYO ELECTRIC CO LTD
发明人
FUKASE KENJI
分类号
H01L21/20;H01L21/263
主分类号
H01L21/20
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代理人
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